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Filing Flows › Onto Innovation (ONTO) › Q1 2026 › vs Q1 2025

Onto Innovation (ONTO) Q1 2026 vs Q1 2025 (year over year)

Onto Innovation's revenue rose $25.3M (+10%) from $267M in Q1 2025 to $292M in Q1 2026. The biggest changes: Systems and Software Revenue +$16.0M (+7%); Parts Revenue +$8.4M (+46%); Service Revenue +$961K (+6%). Gross margin 50.1% against 53.7% (-3.6 pts).

Onto Innovation, Q1 2026: revenue $292M (+10% year over year), operating margin 11.5%, net earnings $33.8M, operating cash flow $26.3M. The chart draws each line against Q1 2025, the increases inside each band.

Onto Innovation: what changed, Q1 2026 vs Q1 2025Onto Innovation: what changed, Q1 2026 vs Q1 2025Operating cash flow−$65.7MFree cash flow (OCF − capex)−$61.0MWorking capital & other$48.2MPre-tax earnings−$33.6MOperating expenses$32.8MNet earnings−$30.3MOperating profit−$29.6MCost of revenue$22.2MOperating cash sources−$17.5MSystems and Software Revenue$16.0M

Margins

Q1 2026Q1 2025Change
Gross margin50.1%53.7%-3.6 pts
Operating margin11.5%23.7%-12.2 pts
Net margin11.6%24.0%-12.5 pts
Free cash flow margin7.8%31.4%-23.6 pts

Every line

LineQ1 2026Q1 2025Change%
Systems and Software Revenue$247M$231M$16.0M+7%
Parts Revenue$26.6M$18.2M$8.4M+46%
Service Revenue$18.2M$17.3M$961K+6%
Revenue$292M$267M$25.3M+10%
Gross profit$146M$143M$3.2M+2%
Cost of revenue$146M$123M$22.2M+18%
Other income, net$4.5M$8.5M−$4.0M-47%
Operating profit$33.5M$63.1M−$29.6M-47%
Operating expenses$113M$80.1M$32.8M+41%
Pre-tax earnings$38.1M$71.7M−$33.6M-47%
Research & development$35.1M$28.0M$7.1M+25%
Sales & marketing$21.5M$19.7M$1.7M+9%
General & admin$31.4M$22.8M$8.6M+38%
Other operating costs$24.9M$9.6M$15.3M+160%
Net earnings$33.8M$64.1M−$30.3M-47%
Income tax$4.3M$7.6M−$3.3M-43%
Operating cash sources$66.2M$83.7M−$17.5M-21%
Depreciation & amortization$25.5M$12.8M$12.6M+98%
Share-based compensation$7.0M$6.8M$197K+3%
Working capital & other$39.9M−$8.2M$48.2M—
Operating cash flow$26.3M$92.0M−$65.7M-71%
Free cash flow (OCF − capex)$22.7M$83.7M−$61.0M-73%
Capital expenditures$3.6M$8.2M−$4.6M-56%

Questions

How much did Onto Innovation's revenue grow year over year in Q1 2026?

Onto Innovation's revenue rose $25.3M (+10%) from $267M in Q1 2025 to $292M in Q1 2026.

What drove Onto Innovation's revenue change in Q1 2026?

Systems and Software Revenue +$16.0M (+7%); Parts Revenue +$8.4M (+46%); Service Revenue +$961K (+6%).

Q1 2026 results → · Compare in the interactive Sankey →