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Axcelis Technologies (ACLS) earnings and revenue breakdown

Latest: Q3 2026 · 10-Q filed Nov 5, 2026 · Axcelis Technologies (ACLS) Q3 2026 earnings results →

Q3 2026 Revenue up 11% year over year to $238M · 16¢ of every $1 of revenue kept as net profit · operating margin 11.5%

Axcelis Technologies made $238M in Q3 2026 (+11% Y/Y): Systems $145M, Aftermarket $92.6M. Operating margin 11.5%, net earnings $37.8M. See where every dollar goes — costs, profit and cash — as a Sankey from the 10-Q filed Nov 5, 2026.

Revenue$238M
Year over year+11%
Operating margin11.5%
Net earnings$37.8M
Operating cash flow$40.2M

Drawing the Sankey…

Open the interactive Sankey → click any line for what the company wrote about it, compare Y/Y and Q/Q, export as PNG or PDF

What changed this quarter

Revenue was $237.8M in Q3 2026, up 11% year over year and up 11% from the previous quarter. Systems was the largest line at 61% of revenue. Aftermarket added $22.7M year over year (up 32%), 94% of the total change.

Gross margin was 41.0%, down 0.6 points from a year earlier. Operating profit was $27.3M, a 11.5% margin (down 0.2 points year over year). Of the extra revenue versus a year earlier, 10% reached operating profit, below the 12% margin then. Operating expenses grew 10% against revenue growth of 11%. The fastest-growing cost line was Research & development (+22%). Net earnings were $37.8M, up 45% year over year. The effective tax rate was -4.9%. Non-operating items added $8.7M, 24% of pre-tax earnings, so the bottom line overstates operating performance.

Operating cash flow was $40.2M (down 11% year over year), 107% of net earnings. Non-cash charges added back $4.5M of depreciation and amortization and $6.5M of share-based compensation. Working capital and other items used $8.5M. Capital expenditures of $2.5M left free cash flow of $37.7M.

Quarterly history

Axcelis Technologies revenue by quarterAxcelis Technologies revenue by quarter$215MQ2 2026$238MQ3 2026
Axcelis Technologies net earnings by quarterAxcelis Technologies net earnings by quarter$23.3MQ2 2026$37.8MQ3 2026
QuarterFormFiledRevenueY/YOp. marginNet earningsOp. cash flow
Q3 202610-QNov 5, 2026$238M+11%11.5%$37.8M$40.2M
Q2 202610-QAug 6, 2026$215M+11%9.4%$23.3M$18.4M

Charts

Axcelis Technologies: where the cash came from (+) and went (−), TTM to Q3 2026Axcelis Technologies: where the cash came from (+) and went (−), TTM to Q3 2026Operating cash flow$70.2MBuybacks−$25.5MOther investing−$20.0MCapital spending−$10.2MOther financing−$9.9MCash drawn (+) / kept (−)−$6.3MShares issued$2.5MNet borrowing (+) / repaid (−)−$1.5MExchange rates$732K
From the cash-flow statement as filed (SEC XBRL). Cash is fungible: the bars do not say which dollar paid for what.
Axcelis Technologies: profit against cash, quarter by quarterAxcelis Technologies: profit against cash, quarter by quarterNet incomeOperating cash flow$50.0M$12.8MQ4 2024$28.6M$39.8MQ1 2025$31.4M$39.7MQ2 2025$26.0M$45.4MQ3 2025$34.3M−$6.6MQ4 2025$9.2M$18.1MQ1 2026$23.3M$18.4MQ2 2026$37.8M$40.2MQ3 2026
Latest (Q3 2026): Net income $37.8M, Operating cash flow $40.2M.
Axcelis Technologies: diluted shares by fiscal yearAxcelis Technologies: diluted shares by fiscal year34MFY202034MFY202134MFY202233MFY202333MFY202432MFY2025
-7.2% since FY2020: buybacks shrank the count.
Axcelis Technologies in its industry: growth against margin (13 companies, SIC 3559)Axcelis Technologies in its industry: growth against margin (13 companies, SIC 3559)revenue growth, year over year →↑ operating marginmedian +12%median 7%LRCXACMRVECOCRCTAZTAASYSVELOTRTERIIGLGISOTKCVVACLS (+11%, 12%)
Special Industry Machinery, NEC; dot size is quarterly revenue; dashed lines are the industry's medians.

Interactive views

The same charts as the app — open one to draw it.

💵Where each $1 goesinteractive

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🌏Named in Asian annual reportsinteractive

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🔄Rotation against the market and its industry (RRG)interactive

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🔍Earnings qualityinteractive

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⚖️Fair value by methodinteractive

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🔭Outlook & guidanceinteractive

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📈Investments: gains and what it boughtinteractive

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🏭Its industry’s money flow (input-output)interactive

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About Axcelis Technologies

Axcelis Technologies, Inc. (“Axcelis,” the “Company,” “we,” “us,” or “our”) designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips. We believe that our Purion family of products offers the most innovative implanters available on the market today. We sell to leading semiconductor chip manufacturers worldwide. The ion implantation business represented 98.2% of our revenue in 2025, with the remaining 1.8% of revenue derived from aftermarket sales associated with other legacy processing systems. In addition to equipment, we provide extensive aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services and customer training.

In its own words, from its 10-K, filed Feb 26, 2026.

Axcelis Technologies against its Special Industry Machinery, NEC peers

The largest companies of the same SEC industry, each at its latest quarter. Revenue growth: +11% against the peers' median +26%. Operating margin: 11.5% against the peers' median 9.9%.

CompanyQuarterRevenueY/YOp. margin
ACLS Axcelis TechnologiesQ3 2026$238M+11%11.5%
LRCX LAM ResearchQ1 FY27$8.2B+54%40.0%
ACMR ACM ResearchQ3 2026$368M+37%15.1%
VECO Veeco InstrumentsQ3 2026$209M+26%6.7%
CRCT CricutQ3 2026$189M+11%18.0%
AZTA AzentaQ3 FY26$161M+12%-2.6%
ASYS Amtech SystemsQ3 FY26$22.4M+14%9.9%
VELO Velo3DQ2 2026$20.7M+52%-53.5%
TRT Trio-Tech InternationalQ4 FY26$14.9M+40%-1.8%

Source: Axcelis Technologies 10-Q on SEC EDGAR · CIK 1113232 · Special Industry Machinery, NEC

Guidance and outlook

Axcelis Technologies Revenue: guidance against what was reportedAxcelis Technologies Revenue: guidance against what was reportedguided rangereported (above / within / below)Q2 2026$215MQ3 2026$238MQ4 2026
Met or beat 2 of 2 guided periods. Grey: the last range guided before the figures came out; dot: the reported figure.
Axcelis Technologies: what its forward-looking statements are about (10-Q filed 2026-11-05)Axcelis Technologies: what its forward-looking statements are about (10-Q filed 2026-11-05)Costs1Demand1Buybacks & dividends1
3 statements; tone +0.33 (−1 all cautious, +1 all confident); 0 hedged.
Axcelis Technologies: outlook statements against the filing beforeAxcelis Technologies: outlook statements against the filing beforeConfident2Cautious1

13F: who owns ACLS and who is buying

Largest holders of ACLS (13F)Largest holders of ACLS (13F)BlackRock$953MFMR LLC$782MVanguard Portfolio Management LLC$470MVanguard Group$331MVanguard Capital Management LLC$263MState Street$233MVictory Capital Management$215MGeode Capital Management, LLC$158MBNP Paribas Asset Management Hold…$152MDimensional Fund Advisors LP$134M
Funds' net buying of ACLS by quarter (13F)Funds' net buying of ACLS by quarter (13F)$12.2M2024-09−$92.0M2024-12$3.0M2025-03$53.6M2025-06−$177M2025-09$48.8M2025-12$126M2026-03−$72.1M2026-06
Value of shares 13F filers added minus the value they sold, each quarter (quarters with most filings in).

More on ACLS

History

Every quarter: Q3 2026 results · Q2 2026 results

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